ECR Ion Source / ECR IS Cryostat (Incident Machine System)
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Cryogenic & Vacuum Engineering
A Electron Eyclotron Resonance ion source is a device that uses an electron cyclotron resonance to heat plasma to convert atoms into multi-valent ions.
The ECR ion source can be used in various industrial field such as cancer treatment or semiconductor plasma processing technology, and it is being developed as equipment to extract ion into RAON and supply it to accelerator.
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